Abstract
In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material. A pyrolytic carbon resonator was embedded as working electrode in an electrochemical cell with a three-electrode configuration. Initial characterization using current-voltage (IV) measurements and cyclic voltammetry (CV) demonstrated that the pyrolytic carbon resonators were suitable as electrodes. The resonance frequency of the carbon resonators was measured to be 143.3 ± 3.4 kHz. The conductive properties of pyrolytic carbon were used to deposit Poly(3,4-ethylenedioxythiophene) (PEDOT) on the resonators by galvanostatic electropolymerization. The electrochemical carbon resonators were able to detect few nanograms of PEDOT added by electrochemical deposition.
Original language | English |
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Journal | Micro and Nano Engineering |
Volume | 2 |
Pages (from-to) | 64-69 |
ISSN | 2590-0072 |
DOIs | |
Publication status | Published - 2019 |
Keywords
- Electro deposition
- Mass sensing
- MEMS resonators
- Pyrolytic carbon