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Abstract

In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material. A pyrolytic carbon resonator was embedded as working electrode in an electrochemical cell with a three-electrode configuration. Initial characterization using current-voltage (IV) measurements and cyclic voltammetry (CV) demonstrated that the pyrolytic carbon resonators were suitable as electrodes. The resonance frequency of the carbon resonators was measured to be 143.3 ± 3.4 kHz. The conductive properties of pyrolytic carbon were used to deposit Poly(3,4-ethylenedioxythiophene) (PEDOT) on the resonators by galvanostatic electropolymerization. The electrochemical carbon resonators were able to detect few nanograms of PEDOT added by electrochemical deposition.

Original languageEnglish
JournalMicro and Nano Engineering
Volume2
Pages (from-to)64-69
ISSN2590-0072
DOIs
Publication statusPublished - 2019

Keywords

  • Electro deposition
  • Mass sensing
  • MEMS resonators
  • Pyrolytic carbon

Cite this

@article{8136e7d4c718457aa04f737f95d9aa76,
title = "Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers",
abstract = "In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material. A pyrolytic carbon resonator was embedded as working electrode in an electrochemical cell with a three-electrode configuration. Initial characterization using current-voltage (IV) measurements and cyclic voltammetry (CV) demonstrated that the pyrolytic carbon resonators were suitable as electrodes. The resonance frequency of the carbon resonators was measured to be 143.3 ± 3.4 kHz. The conductive properties of pyrolytic carbon were used to deposit Poly(3,4-ethylenedioxythiophene) (PEDOT) on the resonators by galvanostatic electropolymerization. The electrochemical carbon resonators were able to detect few nanograms of PEDOT added by electrochemical deposition.",
keywords = "Electro deposition, Mass sensing, MEMS resonators, Pyrolytic carbon",
author = "Quang, {Long Nguyen} and Arnab Halder and Babak Rezaei and Larsen, {Peter Emil} and Yi Sun and Anja Boisen and Keller, {Stephan Sylvest}",
year = "2019",
doi = "10.1016/j.mne.2019.01.001",
language = "English",
volume = "2",
pages = "64--69",
journal = "Micro and Nano Engineering",
issn = "2590-0072",
publisher = "Elsevier",

}

Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers. / Quang, Long Nguyen; Halder, Arnab; Rezaei, Babak; Larsen, Peter Emil; Sun, Yi; Boisen, Anja; Keller, Stephan Sylvest.

In: Micro and Nano Engineering, Vol. 2, 2019, p. 64-69.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers

AU - Quang, Long Nguyen

AU - Halder, Arnab

AU - Rezaei, Babak

AU - Larsen, Peter Emil

AU - Sun, Yi

AU - Boisen, Anja

AU - Keller, Stephan Sylvest

PY - 2019

Y1 - 2019

N2 - In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material. A pyrolytic carbon resonator was embedded as working electrode in an electrochemical cell with a three-electrode configuration. Initial characterization using current-voltage (IV) measurements and cyclic voltammetry (CV) demonstrated that the pyrolytic carbon resonators were suitable as electrodes. The resonance frequency of the carbon resonators was measured to be 143.3 ± 3.4 kHz. The conductive properties of pyrolytic carbon were used to deposit Poly(3,4-ethylenedioxythiophene) (PEDOT) on the resonators by galvanostatic electropolymerization. The electrochemical carbon resonators were able to detect few nanograms of PEDOT added by electrochemical deposition.

AB - In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material. A pyrolytic carbon resonator was embedded as working electrode in an electrochemical cell with a three-electrode configuration. Initial characterization using current-voltage (IV) measurements and cyclic voltammetry (CV) demonstrated that the pyrolytic carbon resonators were suitable as electrodes. The resonance frequency of the carbon resonators was measured to be 143.3 ± 3.4 kHz. The conductive properties of pyrolytic carbon were used to deposit Poly(3,4-ethylenedioxythiophene) (PEDOT) on the resonators by galvanostatic electropolymerization. The electrochemical carbon resonators were able to detect few nanograms of PEDOT added by electrochemical deposition.

KW - Electro deposition

KW - Mass sensing

KW - MEMS resonators

KW - Pyrolytic carbon

U2 - 10.1016/j.mne.2019.01.001

DO - 10.1016/j.mne.2019.01.001

M3 - Journal article

VL - 2

SP - 64

EP - 69

JO - Micro and Nano Engineering

JF - Micro and Nano Engineering

SN - 2590-0072

ER -