Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers

Long Nguyen Quang, Arnab Halder, Babak Rezaei, Peter Emil Larsen, Yi Sun, Anja Boisen, Stephan Sylvest Keller*

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

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In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material. A pyrolytic carbon resonator was embedded as working electrode in an electrochemical cell with a three-electrode configuration. Initial characterization using current-voltage (IV) measurements and cyclic voltammetry (CV) demonstrated that the pyrolytic carbon resonators were suitable as electrodes. The resonance frequency of the carbon resonators was measured to be 143.3 ± 3.4 kHz. The conductive properties of pyrolytic carbon were used to deposit Poly(3,4-ethylenedioxythiophene) (PEDOT) on the resonators by galvanostatic electropolymerization. The electrochemical carbon resonators were able to detect few nanograms of PEDOT added by electrochemical deposition.

Original languageEnglish
JournalMicro and Nano Engineering
Pages (from-to)64-69
Publication statusPublished - 2019


  • Electro deposition
  • Mass sensing
  • MEMS resonators
  • Pyrolytic carbon


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