Electrocatalytic activity of Pt grown by ALD on carbon nanotubes for Si-based DMFC applications

Alicia Charlotte Johansson, Bjarke Thomas Dalslet, R.B. Yang, K.B. Haugshøj, M.J.G. Mølgaard, Kristina Aggergaard Christiansen, L.H. Christensen, Erik Vilain Thomsen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


    We present an anode design for silicon-based direct methanol fuel cell (DMFC) applications. Platinum was deposited conformally by atomic layer deposition (ALD) onto vertically aligned, nitrogendoped multi-walled carbon nanotubes (MWCNTs) grown on porous silicon. The deposition was carried out in a top-flow ALD reactor at 250°C, using MeCpPtMe3 and O2 as precursors. The anode was tested for the methanol oxidation reaction (MOR) in a three-electrode electrochemical set-up and it showed improved catalytic activity compared to a reference sample of Pt deposited on flat Si. It is demonstrated that ALD could be a MEMS compatible deposition technique for Si-based fuel cell applications. © The Electrochemical Society.
    Original languageEnglish
    Title of host publicationECS Transactions
    Publication date2012
    Publication statusPublished - 2012
    EventPacific Rim Meeting on Electrochemical and Solid-State Science: 222nd Meeting of ECS — The Electrochemical Society and 2012 Fall Meeting of The Electrochemical Society of Japan - Hawaii Convention Center and the Hilton Hawaiian Village, Honolulu, United States
    Duration: 7 Oct 201212 Oct 2012


    ConferencePacific Rim Meeting on Electrochemical and Solid-State Science
    LocationHawaii Convention Center and the Hilton Hawaiian Village
    Country/TerritoryUnited States
    Internet address
    SeriesE C S Transactions


    • Catalyst activity
    • Deposition
    • Direct methanol fuel cells (DMFC)
    • Platinum
    • Porous silicon
    • Silicon
    • Atomic layer deposition


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