| Original language | English |
|---|---|
| Title of host publication | Proc. 4th Int. Symp. on High Purity Silicon: Proc. of Electrochem. Soc. 96-13 |
| Publisher | The Electrochemical Society |
| Publication date | 1996 |
| Pages | 500-511 |
| Publication status | Published - 1996 |
| Event | 4th International Symposium on High Purity Silicon - San Antonio, TX, United States Duration: 6 Oct 1996 → 11 Oct 1996 Conference number: 4 |
Conference
| Conference | 4th International Symposium on High Purity Silicon |
|---|---|
| Number | 4 |
| Country/Territory | United States |
| City | San Antonio, TX |
| Period | 06/10/1996 → 11/10/1996 |
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