TY - JOUR
T1 - Electrical Contact Formation in Micro Four‐Point Probe Measurements
AU - Folkersma, Steven
AU - Bogdanowicz, Janusz
AU - Petersen, Dirch Hjorth
AU - Hansen, Ole
AU - Henrichsen, Henrik Hartmann
AU - Nielsen, Peter Former
AU - Shiv, Lior
AU - Vandervorst, Wilfried
PY - 2020
Y1 - 2020
N2 - Herein, the electrical contact formation between the electrodes of the micro four‐point technique and a semiconducting sample is described. It is shown that the contact is formed in two stages: a voltage‐induced electrical contact formation, followed by a current‐induced decrease in contact resistance. Moreover, a method is proposed allowing for precise control of the final contact resistance. Finally, it is demonstrated that the contacting process is similar on 1D fin structures, where the demonstrated control of the electrical contact is needed while measuring on nanometer‐wide fins in arrays with a pitch smaller than the electrode contact size.
AB - Herein, the electrical contact formation between the electrodes of the micro four‐point technique and a semiconducting sample is described. It is shown that the contact is formed in two stages: a voltage‐induced electrical contact formation, followed by a current‐induced decrease in contact resistance. Moreover, a method is proposed allowing for precise control of the final contact resistance. Finally, it is demonstrated that the contacting process is similar on 1D fin structures, where the demonstrated control of the electrical contact is needed while measuring on nanometer‐wide fins in arrays with a pitch smaller than the electrode contact size.
KW - Micro four-point probe
KW - FinFET
KW - Electrical contact
U2 - 10.1002/pssa.201900579
DO - 10.1002/pssa.201900579
M3 - Journal article
SN - 1862-6319
VL - 217
JO - Physica Status Solidi. A: Applications and Materials Science (Online)
JF - Physica Status Solidi. A: Applications and Materials Science (Online)
IS - 5
M1 - 1900579
ER -