Electrical characterization of InGaAs ultra-shallow junctions

Dirch Hjorth Petersen; Ole Hansen; Peter Bøggild; R. Lin; P.F. Nielsen; D. Lin; C. Adelmann; A. Alian; C. Merckling; J. Penaud; G. Brammertz; J. Goossens; W. Vandervorst; T. Clarysse

Electrical characterization of InGaAs ultra-shallow junctions

Dirch Hjorth Petersen
, Ole Hansen
, Peter Bøggild
, R. Lin
, P.F. Nielsen
, D. Lin
, C. Adelmann
, A. Alian
, C. Merckling
, J. Penaud
, G. Brammertz
, J. Goossens
, W. Vandervorst
, T. Clarysse

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2009
Publication status	Published - 2009
Event	INSIGHT - San-Francisco, USA Duration: 1 Jan 2009 → …

Conference

Conference	INSIGHT
City	San-Francisco, USA
Period	01/01/2009 → …

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title = "Electrical characterization of InGaAs ultra-shallow junctions",

author = "Petersen, \{Dirch Hjorth\} and Ole Hansen and Peter B{\o}ggild and R. Lin and P.F. Nielsen and D. Lin and C. Adelmann and A. Alian and C. Merckling and J. Penaud and G. Brammertz and J. Goossens and W. Vandervorst and T. Clarysse",

year = "2009",

language = "English",

note = "INSIGHT ; Conference date: 01-01-2009",

}

TY - CONF

T1 - Electrical characterization of InGaAs ultra-shallow junctions

AU - Petersen, Dirch Hjorth

AU - Hansen, Ole

AU - Bøggild, Peter

AU - Lin, R.

AU - Nielsen, P.F.

AU - Lin, D.

AU - Adelmann, C.

AU - Alian, A.

AU - Merckling, C.

AU - Penaud, J.

AU - Brammertz, G.

AU - Goossens, J.

AU - Vandervorst, W.

AU - Clarysse, T.

PY - 2009

Y1 - 2009

M3 - Poster

T2 - INSIGHT

Y2 - 1 January 2009

ER -