Electrical characterization of InGaAs ultra-shallow junctions

Dirch Hjorth Petersen, Ole Hansen, Peter Bøggild, Rong Lin, P.F. Nielsen, D. Lin, C. Adelmann, A. Alian, C. Merckling, J. Penaud, G. Brammertz, J. Goossens, W. Vandervorst, T. Clarysse

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