Electrical characterization of InGaAs ultra-shallow junctions

Dirch Hjorth Petersen, Ole Hansen, Peter Bøggild, R. Lin, P.F. Nielsen, D. Lin, C. Adelmann, A. Alian, C. Merckling, J. Penaud, G. Brammertz, J. Goossens, W. Vandervorst, T. Clarysse

    Research output: Contribution to conferencePosterResearchpeer-review

    Original languageEnglish
    Publication date2009
    Publication statusPublished - 2009
    EventINSIGHT - San-Francisco, USA
    Duration: 1 Jan 2009 → …

    Conference

    ConferenceINSIGHT
    CitySan-Francisco, USA
    Period01/01/2009 → …

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