TY - JOUR
T1 - Electrical and optical properties of thin indium tin oxide films produced by pulsed laser ablation in oxygen or rare gas atmospheres
AU - Thestrup, B.
AU - Schou, Jørgen
AU - Nordskov, A.
AU - Larsen, N.B.
PY - 1999
Y1 - 1999
N2 - Films of indium tin oxide (ITO) have been produced in different background gases by pulsed laser deposition (PLD). The Films deposited in rare gas atmospheres on room temperature substrates were metallic, electrically conductive, but had poor transmission of visible light. For substrate temperatures at 200 degrees C, the specific resistivity was reduced and the transmission of visible light enhanced for all background gases. Films produced in oxygen turned out to be superior to films deposited in other gases at the same temperature. (C) 1999 Elsevier Science B.V. All rights reserved.
AB - Films of indium tin oxide (ITO) have been produced in different background gases by pulsed laser deposition (PLD). The Films deposited in rare gas atmospheres on room temperature substrates were metallic, electrically conductive, but had poor transmission of visible light. For substrate temperatures at 200 degrees C, the specific resistivity was reduced and the transmission of visible light enhanced for all background gases. Films produced in oxygen turned out to be superior to films deposited in other gases at the same temperature. (C) 1999 Elsevier Science B.V. All rights reserved.
KW - Optik og sensorsystemer
U2 - 10.1016/S0169-4332(98)00659-X
DO - 10.1016/S0169-4332(98)00659-X
M3 - Journal article
SN - 0169-4332
VL - 142
SP - 248
EP - 252
JO - Applied Surface Science
JF - Applied Surface Science
IS - 1-4
ER -