Electrical and optical properties of thin indium tin oxide films produced by pulsed laser ablation in oxygen or rare gas atmospheres

B. Thestrup, Jørgen Schou, A. Nordskov, N.B. Larsen

    Research output: Contribution to journalJournal article

    Abstract

    Films of indium tin oxide (ITO) have been produced in different background gases by pulsed laser deposition (PLD). The Films deposited in rare gas atmospheres on room temperature substrates were metallic, electrically conductive, but had poor transmission of visible light. For substrate temperatures at 200 degrees C, the specific resistivity was reduced and the transmission of visible light enhanced for all background gases. Films produced in oxygen turned out to be superior to films deposited in other gases at the same temperature. (C) 1999 Elsevier Science B.V. All rights reserved.
    Original languageEnglish
    JournalApplied Surface Science
    Volume142
    Issue number1-4
    Pages (from-to)248-252
    ISSN0169-4332
    DOIs
    Publication statusPublished - 1999

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