Abstract
We achieve an ultra-uniform 4-inch SiC-on-insulator wafer for high-yield waveguides. For the first time, we demonstrate second-harmonic generation in a 4H-SiCOI waveguide with conversion efficiency as high as 5.4% W-1.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of CLEO: Science and Innovations 2022 |
| Number of pages | 2 |
| Publisher | Optica Publishing Group |
| Publication date | 2022 |
| Article number | SM4O.7 |
| ISBN (Print) | 978-1-6654-6666-0 |
| ISBN (Electronic) | 978-1-957171-05-0 |
| DOIs | |
| Publication status | Published - 2022 |
| Event | CLEO: Science and Innovations 2022 - San Jose, United States Duration: 15 May 2022 → 20 May 2022 |
Conference
| Conference | CLEO: Science and Innovations 2022 |
|---|---|
| Country/Territory | United States |
| City | San Jose |
| Period | 15/05/2022 → 20/05/2022 |
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