Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves

Cameron L. C. Smith, Anil Haraksingh Thilsted, Cesar E. Garcia-Ortiz, Ilya P. Radko, Rodolphe Marie, Claus Jeppesen, Christoph Vannahme, Sergey I. Bozhevolnyi, Anders Kristensen

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We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 μm long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.
Original languageEnglish
JournalInternational Nano Letters
Issue number3
Pages (from-to)1659-1664
Publication statusPublished - 2014


  • Channel plasmon polariton
  • V-groove
  • Termination mirror
  • Plasmonic coupler
  • UV lithography

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