Effects of subsurface scattering on the accuracy of optical 3D measurements using miniature polymer step gauges

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We present a study on the effects of sub-surface scattering quantified by means of uni- and bidirectional distance measurements on miniature step gauges, which were manufactured in four different polymer materials (POM, PEEK, PPS and ABS), and calibrated using a coordinate measuring machine. Measurement were performed using an own developed structured light 3D scanner, which provides detailed knowledge of the scan process and allows access to raw data and unbiased evaluation of the sub-surface effects. Analysis was carried out with the CMM measurement strategy adapted to optical data in the software GOM Inspect. Results show bidirectional deviations (optical measurement compared to CMM) in the order of 100m to 800m (material dependent) and consistently higher than corresponding unidirectional measurements, indicating a systematic error induced by the light-material interaction. We hypothesize that part of these effects can be accounted for, enabling optical measurements of a wider range of materials.
Original languageEnglish
Title of host publicationProceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology
EditorsD. Billington, R. K. Leach, D. Phillips, O. Riemer, E. Savio
PublisherThe European Society for Precision Engineering and Nanotechnology
Publication date2018
Pages449-450
ISBN (Electronic)9780995775121
Publication statusPublished - 2018
Event18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18) - Venice, Italy
Duration: 4 Jun 20188 Jun 2018

Conference

Conference18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18)
CountryItaly
CityVenice
Period04/06/201808/06/2018

    Research areas

  • Optical metrology, 3D scanning, Dimensional Accuracy, Polymers

ID: 183368231