Effect of gold coating on the Q-factor of resonant cantilevers

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume15
    Pages (from-to)2249-2253
    ISSN0960-1317
    Publication statusPublished - 2005

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