Abstract
Black silicon is produced by laser annealing of a-Si:H films. During annealing, silicon microstructures are formed on the surface. We use time-resolved terahertz spectroscopy to study the photoconductivity dynamics in black silicon. We find that when a copper film is deposited on top of the a-Si:H layer prior to laser annealing, the carrier lifetime of black silicon is significantly reduced.
| Original language | English |
|---|---|
| Journal | Journal of Infrared, Millimeter and Terahertz Waves |
| Volume | 32 |
| Issue number | 7 |
| Pages (from-to) | 883-886 |
| ISSN | 1866-6892 |
| DOIs | |
| Publication status | Published - 2011 |
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