Dry release of suspended nanostructures

Esko Sebastian Forsén, Zachary James Davis, M. Dong, S. G. Nilsson, L. Montelius, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Micro and nanoengineering (MNE)
Place of Publication	Cambridge, UK
Publication date	2003
Pages	312-313
Publication status	Published - 2003

OpenUrl availability

@inproceedings{24733ef409204090817efe63f8ba059c,

title = "Dry release of suspended nanostructures",

author = "Fors{\'e}n, \{Esko Sebastian\} and Davis, \{Zachary James\} and M. Dong and Nilsson, \{S. G.\} and L. Montelius and Anja Boisen",

year = "2003",

language = "English",

pages = "312--313",

booktitle = "Proceedings of the Micro and nanoengineering (MNE)",

}