Dry release of suspended nanostructures

Esko Sebastian Forsén, Zachary James Davis, M. Dong, S. G. Nilsson, L. Montelius, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Micro and nanoengineering (MNE)
    Place of PublicationCambridge, UK
    Publication date2003
    Publication statusPublished - 2003

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