Original language | English |
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Title of host publication | Proceedings of the Micro and nanoengineering (MNE) |
Place of Publication | Cambridge, UK |
Publication date | 2003 |
Pages | 312-313 |
Publication status | Published - 2003 |
Dry release of suspended nanostructures
Esko Sebastian Forsén, Zachary James Davis, M. Dong, S. G. Nilsson, L. Montelius, Anja Boisen
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review