Dry release of all-polymeric structures

Daniel Häfliger, Maria Nordström, P.A. Rasmussen, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Microelectronic Engineering
Volume	78-79
Pages (from-to)	88-92
ISSN	0167-9317
Publication status	Published - 2005

OpenUrl availability

@article{b89afdec8f5840d1bb25b2a9651edd64,

title = "Dry release of all-polymeric structures",

author = "Daniel H{\"a}fliger and Maria Nordstr{\"o}m and P.A. Rasmussen and Anja Boisen",

year = "2005",

language = "English",

volume = "78-79",

pages = "88--92",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}