Dry etching for flat panel displays

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	Handbook of Visual Display Technology
Editors	Janglin Chen, Wayne Cranton, Mark Fihn
Publisher	Springer
Publication date	2012
Pages	871-884
ISBN (Print)	978-3-540-79568-1
Publication status	Published - 2012

Keywords

@inbook{98b323bb70154b78ab87636e65a92dbb,

title = "Dry etching for flat panel displays",

keywords = "Plasma processing, Fusion energy, Fusionsenergi, Plasmaprocessering",

author = "Eugen Stamate and Yeom, \{Geun Young\}",

year = "2012",

language = "English",

isbn = "978-3-540-79568-1",

pages = "871--884",

editor = "Janglin Chen and Wayne Cranton and Mark Fihn",

booktitle = "Handbook of Visual Display Technology",

publisher = "Springer",

}

TY - CHAP

T1 - Dry etching for flat panel displays

AU - Stamate, Eugen

AU - Yeom, Geun Young

PY - 2012

Y1 - 2012

KW - Plasma processing

KW - Fusion energy

KW - Fusionsenergi

KW - Plasmaprocessering

M3 - Book chapter

SN - 978-3-540-79568-1

SP - 871

EP - 884

BT - Handbook of Visual Display Technology

A2 - Chen, Janglin

A2 - Cranton, Wayne

A2 - Fihn, Mark

PB - Springer

ER -