Dry etching for flat panel displays

Eugen Stamate, Geun Young Yeom

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Original languageEnglish
Title of host publicationHandbook of Visual Display Technology
EditorsJanglin Chen, Wayne Cranton, Mark Fihn
PublisherSpringer
Publication date2012
Pages871-884
ISBN (Print)978-3-540-79568-1
Publication statusPublished - 2012

Keywords

  • Plasma processing
  • Fusion energy

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