Dry Etching

Eugen Stamate, Geun Young Yeom

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

Abstract

Production of large-area flat panel displays (FPDs) involves several pattern transfer and device fabrication steps that can be performed with dry etching technologies. Even though the dry etching using capacitively coupled plasma is generally used to maintain high etch uniformity, due to the need for the higher processing rates in FPDs, high-density plasma processing tools that can handle larger-area substrate uniformly are more intensively studied especially for the dry etching of polysilicon thin films. In the case of FPD processing, the current substrate size ranges from 730 × 920 mm (fourth generation) to 2,200 × 2,500 mm (eighth generation), and the substrate size is expected to increase further within a few years. This chapter aims to present relevant details on dry etching including the phenomenology, materials to be etched with the different recipes, plasma sources fulfilling the dry etching requirements, and advantages of dry etching over wet processing. Current status and future trends are also presented.
Original languageEnglish
Title of host publicationHandbook of Visual Display Technology
EditorsJanglin Chen, Wayne Cranton, Mark Fihn
PublisherSpringer
Publication date2016
Edition2
Pages1343-1356
ISBN (Print)978-3-319-14345-3, 978-3-319-14347-7
ISBN (Electronic)978-3-319-14346-0
DOIs
Publication statusPublished - 2016

Cite this

Stamate, E., & Yeom, G. Y. (2016). Dry Etching. In J. Chen, W. Cranton, & M. Fihn (Eds.), Handbook of Visual Display Technology (2 ed., pp. 1343-1356). Springer. https://doi.org/10.1007/978-3-319-14346-0_60
Stamate, Eugen ; Yeom, Geun Young. / Dry Etching. Handbook of Visual Display Technology. editor / Janglin Chen ; Wayne Cranton ; Mark Fihn. 2. ed. Springer, 2016. pp. 1343-1356
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Stamate, E & Yeom, GY 2016, Dry Etching. in J Chen, W Cranton & M Fihn (eds), Handbook of Visual Display Technology. 2 edn, Springer, pp. 1343-1356. https://doi.org/10.1007/978-3-319-14346-0_60

Dry Etching. / Stamate, Eugen; Yeom, Geun Young.

Handbook of Visual Display Technology. ed. / Janglin Chen; Wayne Cranton; Mark Fihn. 2. ed. Springer, 2016. p. 1343-1356.

Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

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AB - Production of large-area flat panel displays (FPDs) involves several pattern transfer and device fabrication steps that can be performed with dry etching technologies. Even though the dry etching using capacitively coupled plasma is generally used to maintain high etch uniformity, due to the need for the higher processing rates in FPDs, high-density plasma processing tools that can handle larger-area substrate uniformly are more intensively studied especially for the dry etching of polysilicon thin films. In the case of FPD processing, the current substrate size ranges from 730 × 920 mm (fourth generation) to 2,200 × 2,500 mm (eighth generation), and the substrate size is expected to increase further within a few years. This chapter aims to present relevant details on dry etching including the phenomenology, materials to be etched with the different recipes, plasma sources fulfilling the dry etching requirements, and advantages of dry etching over wet processing. Current status and future trends are also presented.

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Stamate E, Yeom GY. Dry Etching. In Chen J, Cranton W, Fihn M, editors, Handbook of Visual Display Technology. 2 ed. Springer. 2016. p. 1343-1356 https://doi.org/10.1007/978-3-319-14346-0_60