Double sided surface stress cantilever sensor

P.A. Rasmussen, Alexander Grigorov, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	5
Pages (from-to)	1088–1091
ISSN	0960-1317
Publication status	Published - 2005

SFX availability

@article{c703a06a51a246c299d3ee2596946914,

title = "Double sided surface stress cantilever sensor",

author = "P.A. Rasmussen and Alexander Grigorov and Anja Boisen",

year = "2005",

language = "English",

volume = "15",

pages = "1088–1091",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "5",

}