Double sided surface stress cantilever sensor

P.A. Rasmussen, Alexander Grigorov, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume15
    Issue number5
    Pages (from-to)1088–1091
    ISSN0960-1317
    Publication statusPublished - 2005

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