Double layer resist process scheme for metal lift-off with application in inductive heating of microstructures

Lassana Ouattara, Michael Knutzen, Stephan Urs Keller, M. F. Hansen, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Fingerprint

    Dive into the research topics of 'Double layer resist process scheme for metal lift-off with application in inductive heating of microstructures'. Together they form a unique fingerprint.

    Physics

    Computer Science