Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O2)2

V. Friedli, I. Utke, Kristian Mølhave, J. Michler

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@article{01eb0d0555dd4775a96f391296d49cbe,

title = "Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O2)2",

author = "V. Friedli and I. Utke and Kristian M{\o}lhave and J. Michler",

year = "2009",

doi = "10.1088/0957-4484/20/38/385304",

language = "English",

volume = "20",

pages = "11",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

number = "38",

}

TY - JOUR

T1 - Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O2)2

AU - Friedli, V.

AU - Utke, I.

AU - Mølhave, Kristian

AU - Michler, J.

PY - 2009

Y1 - 2009

U2 - 10.1088/0957-4484/20/38/385304

DO - 10.1088/0957-4484/20/38/385304

M3 - Journal article

C2 - 19713594

SN - 0957-4484

VL - 20

SP - 11

JO - Nanotechnology

JF - Nanotechnology

IS - 38

ER -