Discharge mode transitions in low-frequency inductively coupled plasmas with internal oscillating current sheets

Z.L. Tsakadze, K. Ostrikov, E.L. Taskadze, S. Xu

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	23
Pages (from-to)	440-447
ISSN	1553-1813
DOIs	https://doi.org/10.1116/1.1875252
Publication status	Published - 2005

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@article{f2621718d1114520a14cd25514851a61,

title = "Discharge mode transitions in low-frequency inductively coupled plasmas with internal oscillating current sheets",

keywords = "6-I optik",

author = "Z.L. Tsakadze and K. Ostrikov and E.L. Taskadze and S. Xu",

year = "2005",

doi = "10.1116/1.1875252",

language = "English",

volume = "23",

pages = "440--447",

journal = "Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "1553-1813",

publisher = "American Institute of Physics",

}

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - Discharge mode transitions in low-frequency inductively coupled plasmas with internal oscillating current sheets

AU - Tsakadze, Z.L.

AU - Ostrikov, K.

AU - Taskadze, E.L.

AU - Xu, S.

PY - 2005

Y1 - 2005

KW - 6-I optik

U2 - 10.1116/1.1875252

DO - 10.1116/1.1875252

M3 - Journal article

SN - 1553-1813

VL - 23

SP - 440

EP - 447

JO - Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films

ER -