Direct van der Waals epitaxy of crack-free AlN thin film on epitaxial WS2

Yue Yin, Fang Ren, Yunyu Wang, Zhiqiang Liu*, Jinping Ao, Meng Liang, Tongbo Wei, Guodong Yuan, Haiyan Ou, Jianchang Yan, Xiaoyan Yi, Junxi Wang, Jinmin Li

*Corresponding author for this work

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