Direct van der Waals epitaxy of crack-free AlN thin film on epitaxial WS2

Yue Yin, Fang Ren, Yunyu Wang, Zhiqiang Liu*, Jinping Ao, Meng Liang, Tongbo Wei, Guodong Yuan, Haiyan Ou, Jianchang Yan, Xiaoyan Yi, Junxi Wang, Jinmin Li

*Corresponding author for this work

    Research output: Contribution to journalJournal articleResearchpeer-review

    501 Downloads (Pure)


    Van der Waals epitaxy (vdWE) has drawn continuous attention, as it is unlimited by lattice-mismatch between epitaxial layers and substrates. Previous reports on the vdWE of IIInitride thin film were mainly based on two-dimensional (2D) materials by plasma pretreatment or pre-doping of other hexagonal materials. However, it is still a huge challenge for single-crystalline thin film on 2D materials without any other extra treatment or interlayer. Here, we grew highquality single-crystalline AlN thin film on sapphire substrate with an intrinsic W2 overlayer (W2/sapphire) by metal-organic chemical vapor deposition, which had surface roughness and defect density similar to that grown on conventional sapphire substrates. Moreover, an AlGaNbased deep ultraviolet light emitting diode structure on W2/sapphire was demonstrated. The electroluminescence (EL) performance exhibited strong emissions with a single peak at 283 nm. The wavelength of the single peak only showed a faint peak-position shift with increasing current to 80 mA, which further indicated the high quality and low stress of the AlN thin film. This work provides a promising solution for further deep-ultraviolet (DUV) light emitting electrodes (LEDs) development on 2D materials, as well as other unconventional substrates.
    Original languageEnglish
    Article number2464
    Issue number12
    Number of pages9
    Publication statusPublished - 2018


    • W2


    Dive into the research topics of 'Direct van der Waals epitaxy of crack-free AlN thin film on epitaxial WS2'. Together they form a unique fingerprint.

    Cite this