Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

Mikkel Berri Lotz, Christian R. Petersen, Christos Markos, Ole Bang, Mogens H. Jakobsen, Rafael J. Taboryski

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
Event44th International Conference on Micro and NanoEngineering - Copenhagen, Denmark
Duration: 24 Sept 201827 Sept 2018
Conference number: 44

Conference

Conference44th International Conference on Micro and NanoEngineering
Number44
Country/TerritoryDenmark
CityCopenhagen
Period24/09/201827/09/2018

Keywords

  • Chalcogenide
  • Moth-eye
  • Antireflective
  • Nanoimprinting
  • Mid-infrared
  • Photoresist reflow

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