Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
Event44th International Conference on Micro and NanoEngineering - Copenhagen, Denmark
Duration: 24 Sep 201827 Sep 2018

Conference

Conference44th International Conference on Micro and NanoEngineering
CountryDenmark
CityCopenhagen
Period24/09/201827/09/2018

Keywords

  • Chalcogenide
  • Moth-eye
  • Antireflective
  • Nanoimprinting
  • Mid-infrared
  • Photoresist reflow

Cite this

Lotz, M. B., Petersen, C. R., Markos, C., Bang, O., Jakobsen, M. H., & Taboryski, R. J. (2018). Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass. Abstract from 44th International Conference on Micro and NanoEngineering, Copenhagen, Denmark.
@conference{e60dcb50f0744ba7a08ae48b308c8fa9,
title = "Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass",
keywords = "Chalcogenide, Moth-eye, Antireflective, Nanoimprinting, Mid-infrared, Photoresist reflow",
author = "Lotz, {Mikkel Berri} and Petersen, {Christian R.} and Christos Markos and Ole Bang and Jakobsen, {Mogens H.} and Taboryski, {Rafael J.}",
year = "2018",
language = "English",
note = "44th International Conference on Micro and NanoEngineering ; Conference date: 24-09-2018 Through 27-09-2018",

}

Lotz, MB, Petersen, CR, Markos, C, Bang, O, Jakobsen, MH & Taboryski, RJ 2018, 'Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass', 44th International Conference on Micro and NanoEngineering, Copenhagen, Denmark, 24/09/2018 - 27/09/2018.

Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass. / Lotz, Mikkel Berri; Petersen, Christian R.; Markos, Christos; Bang, Ole; Jakobsen, Mogens H.; Taboryski, Rafael J.

2018. Abstract from 44th International Conference on Micro and NanoEngineering, Copenhagen, Denmark.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

TY - ABST

T1 - Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

AU - Lotz, Mikkel Berri

AU - Petersen, Christian R.

AU - Markos, Christos

AU - Bang, Ole

AU - Jakobsen, Mogens H.

AU - Taboryski, Rafael J.

PY - 2018

Y1 - 2018

KW - Chalcogenide

KW - Moth-eye

KW - Antireflective

KW - Nanoimprinting

KW - Mid-infrared

KW - Photoresist reflow

M3 - Conference abstract for conference

ER -

Lotz MB, Petersen CR, Markos C, Bang O, Jakobsen MH, Taboryski RJ. Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass. 2018. Abstract from 44th International Conference on Micro and NanoEngineering, Copenhagen, Denmark.