Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
Event44th International Conference on Micro and NanoEngineering - Copenhagen, Denmark
Duration: 24 Sep 201827 Sep 2018

Conference

Conference44th International Conference on Micro and NanoEngineering
CountryDenmark
CityCopenhagen
Period24/09/201827/09/2018

Keywords

  • Chalcogenide
  • Moth-eye
  • Antireflective
  • Nanoimprinting
  • Mid-infrared
  • Photoresist reflow

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