Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

Mikkel Berri Lotz; Christian R. Petersen; Christos Markos; Ole Bang; Mogens H. Jakobsen; Rafael J. Taboryski

Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

Mikkel Berri Lotz, Christian R. Petersen, Christos Markos, Ole Bang, Mogens H. Jakobsen, Rafael J. Taboryski

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2018
Publication status	Published - 2018
Event	44th International Conference on Micro and NanoEngineering - Copenhagen, Denmark Duration: 24 Sept 2018 → 27 Sept 2018 Conference number: 44

Conference

Conference	44th International Conference on Micro and NanoEngineering
Number	44
Country/Territory	Denmark
City	Copenhagen
Period	24/09/2018 → 27/09/2018

Keywords

Chalcogenide
Moth-eye
Antireflective
Nanoimprinting
Mid-infrared
Photoresist reflow

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@conference{e60dcb50f0744ba7a08ae48b308c8fa9,

title = "Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass",

keywords = "Chalcogenide, Moth-eye, Antireflective, Nanoimprinting, Mid-infrared, Photoresist reflow",

author = "Lotz, \{Mikkel Berri\} and Petersen, \{Christian R.\} and Christos Markos and Ole Bang and Jakobsen, \{Mogens H.\} and Taboryski, \{Rafael J.\}",

year = "2018",

language = "English",

note = "44th International Conference on Micro and NanoEngineering ; Conference date: 24-09-2018 Through 27-09-2018",

}

Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass. / Lotz, Mikkel Berri; Petersen, Christian R.; Markos, Christos et al.
2018. Abstract from 44th International Conference on Micro and NanoEngineering, Copenhagen, Denmark.

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

TY - ABST

T1 - Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

AU - Lotz, Mikkel Berri

AU - Petersen, Christian R.

AU - Markos, Christos

AU - Bang, Ole

AU - Jakobsen, Mogens H.

AU - Taboryski, Rafael J.

N1 - Conference code: 44

PY - 2018

Y1 - 2018

KW - Chalcogenide

KW - Moth-eye

KW - Antireflective

KW - Nanoimprinting

KW - Mid-infrared

KW - Photoresist reflow

M3 - Conference abstract for conference

T2 - 44th International Conference on Micro and NanoEngineering

Y2 - 24 September 2018 through 27 September 2018

ER -