Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2018
Publication status	Published - 2018
Event	44th International Conference on Micro and NanoEngineering - Copenhagen, Denmark Duration: 24 Sep 2018 → 27 Sep 2018

Conference	44th International Conference on Micro and NanoEngineering
Country	Denmark
City	Copenhagen
Period	24/09/2018 → 27/09/2018

@conference{e60dcb50f0744ba7a08ae48b308c8fa9,

title = "Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass",

keywords = "Chalcogenide, Moth-eye, Antireflective, Nanoimprinting, Mid-infrared, Photoresist reflow",

author = "Lotz, {Mikkel Berri} and Petersen, {Christian R.} and Christos Markos and Ole Bang and Jakobsen, {Mogens H.} and Taboryski, {Rafael J.}",

year = "2018",

language = "English",

note = "44th International Conference on Micro and NanoEngineering ; Conference date: 24-09-2018 Through 27-09-2018",

}

2018. Abstract from 44th International Conference on Micro and NanoEngineering, Copenhagen, Denmark.

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

TY - ABST

T1 - Direct nanoimprinting of reflow enhanced antireflective moth-eye structures in chalcogenide glass

AU - Lotz, Mikkel Berri

AU - Petersen, Christian R.

AU - Markos, Christos

AU - Bang, Ole

AU - Jakobsen, Mogens H.

AU - Taboryski, Rafael J.

PY - 2018

Y1 - 2018

KW - Chalcogenide

KW - Moth-eye

KW - Antireflective

KW - Nanoimprinting

KW - Mid-infrared

KW - Photoresist reflow

M3 - Conference abstract for conference

ER -