Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

    Research output: Contribution to journalJournal articleResearchpeer-review

    Fingerprint

    Dive into the research topics of 'Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept'. Together they form a unique fingerprint.

    Physics & Astronomy

    Engineering & Materials Science

    Chemical Compounds