Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

Anders Hyldgård; Karen Birkelund; Jakob Janting; Erik Vilain Thomsen

doi:10.1016/j.sna.2007.02.024

Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

Anders Hyldgård, Karen Birkelund, Jakob Janting, Erik Vilain Thomsen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A packaging concept for Data Storage Tags is presented. A potted-tube packaging concept, using a polystyrene tube and different epoxies as filling material that allows for direct sensor exposure is investigated. The curing temperature, water uptake and the diffusion coefficient for water in the filling material is measured. The packaging concept is used to encapsulate a microfabricated multi-sensor (measuring temperature, water conductivity, pressure and light intensity). The direct exposure of the sensors results in high sensitivity and fast response time. The design of an elongated multi-sensor is described and effectiveness of the packaging is demonstrated with the precise measurement of water conductivity using the packaged multi-sensor. The packaging concept is very promising for high accuracy measurements in harsh environments.

Original language	English
Journal	Sensors and Actuators A: Physical
Volume	142
Issue number	1
Pages (from-to)	398-404
ISSN	0924-4247
DOIs	https://doi.org/10.1016/j.sna.2007.02.024
Publication status	Published - 2008

Keywords

potting
packaging
direct exposure
multi-sensor
harsh environment

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title = "Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept",

abstract = "A packaging concept for Data Storage Tags is presented. A potted-tube packaging concept, using a polystyrene tube and different epoxies as filling material that allows for direct sensor exposure is investigated. The curing temperature, water uptake and the diffusion coefficient for water in the filling material is measured. The packaging concept is used to encapsulate a microfabricated multi-sensor (measuring temperature, water conductivity, pressure and light intensity). The direct exposure of the sensors results in high sensitivity and fast response time. The design of an elongated multi-sensor is described and effectiveness of the packaging is demonstrated with the precise measurement of water conductivity using the packaged multi-sensor. The packaging concept is very promising for high accuracy measurements in harsh environments.",

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AU - Janting, Jakob

AU - Thomsen, Erik Vilain

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AB - A packaging concept for Data Storage Tags is presented. A potted-tube packaging concept, using a polystyrene tube and different epoxies as filling material that allows for direct sensor exposure is investigated. The curing temperature, water uptake and the diffusion coefficient for water in the filling material is measured. The packaging concept is used to encapsulate a microfabricated multi-sensor (measuring temperature, water conductivity, pressure and light intensity). The direct exposure of the sensors results in high sensitivity and fast response time. The design of an elongated multi-sensor is described and effectiveness of the packaging is demonstrated with the precise measurement of water conductivity using the packaged multi-sensor. The packaging concept is very promising for high accuracy measurements in harsh environments.

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KW - harsh environment

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JO - Sensors and Actuators A: Physical

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Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

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Keywords

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