Direct media exposure of MEMS multi-sensor systems using a potted-tube packaging concept

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    Abstract

    A packaging concept for Data Storage Tags is presented. A potted-tube packaging concept, using a polystyrene tube and different epoxies as filling material that allows for direct sensor exposure is investigated. The curing temperature, water uptake and the diffusion coefficient for water in the filling material is measured. The packaging concept is used to encapsulate a microfabricated multi-sensor (measuring temperature, water conductivity, pressure and light intensity). The direct exposure of the sensors results in high sensitivity and fast response time. The design of an elongated multi-sensor is described and effectiveness of the packaging is demonstrated with the precise measurement of water conductivity using the packaged multi-sensor. The packaging concept is very promising for high accuracy measurements in harsh environments.
    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume142
    Issue number1
    Pages (from-to)398-404
    ISSN0924-4247
    DOIs
    Publication statusPublished - 2008

    Keywords

    • potting
    • packaging
    • direct exposure
    • multi-sensor
    • harsh environment

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