Dimensional verification of high aspect ratio micro structures using FIB-SEM

Yang Zhang; Hans Nørgaard Hansen

Dimensional verification of high aspect ratio micro structures using FIB-SEM

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Original language	English
Publication date	2013
Number of pages	1
Publication status	Published - 2013
Event	13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen) - Berlin, Germany Duration: 27 May 2013 → 31 May 2013 Conference number: 13

Conference

Conference	13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen)
Number	13
Country/Territory	Germany
City	Berlin
Period	27/05/2013 → 31/05/2013

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Dimensional verification

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@conference{39ce4f28b6554143a1f62bd79aa78edb,

title = "Dimensional verification of high aspect ratio micro structures using FIB-SEM",

author = "Yang Zhang and Hansen, \{Hans N{\o}rgaard\}",

year = "2013",

language = "English",

note = "13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), euspen ; Conference date: 27-05-2013 Through 31-05-2013",

}