Dimensional verification of high aspect ratio micro structures using FIB-SEM

Research output: Contribution to conferencePosterResearch

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Original languageEnglish
Publication date2013
Number of pages1
Publication statusPublished - 2013
Event13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen) - Berlin, Germany
Duration: 27 May 201331 May 2013
Conference number: 13

Conference

Conference13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen)
Number13
CountryGermany
CityBerlin
Period27/05/201331/05/2013

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