Dimensional verification of high aspect micro structures using FIB-SEM

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Abstract

Micro-structured surfaces are increasingly used for advanced functionality. In particular, micro-structured polymer parts are interesting due to the manufacturing via injection moulding. A micro-structured nickel surface was characterized by focussed ion beam-scanning electron microscope (FIB-SEM) assisted by Spip®. The micro features are circular holes 10μm in diameter and 20μm deep, with a 20μm pitch. Various inspection methods were attempted to obtain dimensional information. Due to the dimension, neither optical instrument nor atomic force microscope (AFM) was capable to perform the measurement. A cross sectioned sample was prepared for conventional SEM in order to inspect the geometry of the holes, but the cutting angle used when making the cross section had a significant influence on the obtained results. Via FIB-SEM, the process was recorded by images when slicing the sample layer by layer by ion-beam. In this way, the dimension and the geometry of the holes are characterized.
Original languageEnglish
Title of host publicationProceedings of the 13th euspen International Conference
Number of pages4
Publication date2013
Publication statusPublished - 2013
Event13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen) - Berlin, Germany
Duration: 27 May 201331 May 2013
Conference number: 13

Conference

Conference13th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen)
Number13
CountryGermany
CityBerlin
Period27/05/201331/05/2013

Cite this

Zhang, Y., & Hansen, H. N. (2013). Dimensional verification of high aspect micro structures using FIB-SEM. In Proceedings of the 13th euspen International Conference