Dimensional micro and nano metrology

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.
Original languageEnglish
JournalC I R P Annals
Volume55
Issue number2
Pages (from-to)721-743
ISSN0007-8506
DOIs
Publication statusPublished - 2006
Event56th General Assembly of CIRP - Kobe, Japan
Duration: 20 Aug 200626 Aug 2006
Conference number: 56

Conference

Conference56th General Assembly of CIRP
Number56
CountryJapan
CityKobe
Period20/08/200626/08/2006

Keywords

  • dimensional metrology
  • micro technology
  • nano technology

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