Diagnostics of surface wave plasmas for giant materials processing

H. Sugai (Invited author), Y. Nojiri (Invited author), T. Ishijima (Invited author), H. Toyoda (Invited author), Eugen Stamate (Invited author)

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of 17th International Symposium on Plasma Chemistry (ISPC)
Number of pages	5
Publication date	2005
Pages	279-283
Publication status	Published - 2005
Externally published	Yes
Event	17th International Symposium on Plasma Chemistry - Toronto, Canada Duration: 7 Aug 2005 → 12 Aug 2005

Conference	17th International Symposium on Plasma Chemistry
Country/Territory	Canada
City	Toronto
Period	07/08/2005 → 12/08/2005

Cite this

@inproceedings{9fe437aa62424144b5ced34420872ead,

title = "Diagnostics of surface wave plasmas for giant materials processing",

author = "H. Sugai and Y. Nojiri and T. Ishijima and H. Toyoda and Eugen Stamate",

year = "2005",

language = "English",

pages = "279--283",

booktitle = "Proceedings of 17th International Symposium on Plasma Chemistry (ISPC)",

note = "17th International Symposium on Plasma Chemistry, ISPC 17 ; Conference date: 07-08-2005 Through 12-08-2005",

}

Diagnostics of surface wave plasmas for giant materials processing. / Sugai, H. (Invited author); Nojiri, Y. (Invited author); Ishijima, T. (Invited author); Toyoda, H. (Invited author); Stamate, Eugen (Invited author).

Proceedings of 17th International Symposium on Plasma Chemistry (ISPC). 2005. p. 279-283.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Diagnostics of surface wave plasmas for giant materials processing

AU - Sugai, H.

AU - Nojiri, Y.

AU - Ishijima, T.

AU - Toyoda, H.

AU - Stamate, Eugen

PY - 2005

Y1 - 2005

M3 - Article in proceedings

SP - 279

EP - 283

BT - Proceedings of 17th International Symposium on Plasma Chemistry (ISPC)

T2 - 17th International Symposium on Plasma Chemistry

Y2 - 7 August 2005 through 12 August 2005

ER -