Diagnostics of surface wave plasmas for giant materials processing

H. Sugai (Invited author), Y. Nojiri (Invited author), T. Ishijima (Invited author), H. Toyoda (Invited author), Eugen Stamate (Invited author)

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of 17th International Symposium on Plasma Chemistry (ISPC)
Number of pages5
Publication date2005
Pages279-283
Publication statusPublished - 2005
Externally publishedYes
Event17th International Symposium on Plasma Chemistry - Toronto, Canada
Duration: 7 Aug 200512 Aug 2005

Conference

Conference17th International Symposium on Plasma Chemistry
CountryCanada
CityToronto
Period07/08/200512/08/2005

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