Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes

K.N. Ostrikov, I.B. Denysenko, Erekle Tsakadze, S. Xu, R.G. Storer

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title = "Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes",

keywords = "2-E tekno",

author = "K.N. Ostrikov and I.B. Denysenko and Erekle Tsakadze and S. Xu and R.G. Storer",

year = "2002",

doi = "10.1063/1.1510598",

language = "English",

volume = "92",

pages = "4935--4946",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes

AU - Ostrikov, K.N.

AU - Denysenko, I.B.

AU - Tsakadze, Erekle

AU - Xu, S.

AU - Storer, R.G.

PY - 2002

Y1 - 2002

KW - 2-E tekno

U2 - 10.1063/1.1510598

DO - 10.1063/1.1510598

M3 - Journal article

SN - 0021-8979

VL - 92

SP - 4935

EP - 4946

JO - Journal of Applied Physics

JF - Journal of Applied Physics

ER -