Abstract
In-situ fatigue test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel (nano-nickel). The devices feature in-plane approximately pure bending with fixed displacement of the test specimen of the dimensions: widths from 2μm to 3.7μm, a height of 7μm and an effective length from 4μm to 27μm. Maximum stresses of the test beam were calculated to be 500MPa to 2100MPa by use of FEM tools. The test results indicate very promising fatigue properties of nano-nickel, as none of the test devices have shown fatigue failure or even initiation of cracks after 108 cycles. The combination of high strength and toughness, which is known for nanocrystalline materials, together with very small test specimens and low surface roughness could be the explanation for the good fatigue properties.
Original language | English |
---|---|
Title of host publication | The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002. |
Publisher | IEEE |
Publication date | 2002 |
Pages | 443-446 |
ISBN (Print) | 0-7803-7185-2 |
DOIs | |
Publication status | Published - 2002 |
Event | 15th IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, United States Duration: 20 Jan 2002 → 24 Jan 2002 Conference number: 15 |
Conference
Conference | 15th IEEE International Conference on Micro Electro Mechanical Systems |
---|---|
Number | 15 |
Country/Territory | United States |
City | Las Vegas, NV |
Period | 20/01/2002 → 24/01/2002 |