Devices for fatigue testing of electroplated nickel (MEMS)

Kristian Pontoppidan Larsen, J. T. Ravnkilde, Morten Ginnerup, Ole Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    372 Downloads (Pure)

    Abstract

    In-situ fatigue test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel (nano-nickel). The devices feature in-plane approximately pure bending with fixed displacement of the test specimen of the dimensions: widths from 2μm to 3.7μm, a height of 7μm and an effective length from 4μm to 27μm. Maximum stresses of the test beam were calculated to be 500MPa to 2100MPa by use of FEM tools. The test results indicate very promising fatigue properties of nano-nickel, as none of the test devices have shown fatigue failure or even initiation of cracks after 108 cycles. The combination of high strength and toughness, which is known for nanocrystalline materials, together with very small test specimens and low surface roughness could be the explanation for the good fatigue properties.
    Original languageEnglish
    Title of host publicationThe Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002.
    PublisherIEEE
    Publication date2002
    Pages443-446
    ISBN (Print)0-7803-7185-2
    DOIs
    Publication statusPublished - 2002
    Event15th IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, United States
    Duration: 20 Jan 200224 Jan 2002
    Conference number: 15

    Conference

    Conference15th IEEE International Conference on Micro Electro Mechanical Systems
    Number15
    CountryUnited States
    CityLas Vegas, NV
    Period20/01/200224/01/2002

    Bibliographical note

    Copyright: 2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    Fingerprint Dive into the research topics of 'Devices for fatigue testing of electroplated nickel (MEMS)'. Together they form a unique fingerprint.

    Cite this