Devices for fatigue testing of electroplated nickel (MEMS)

Kristian Pontoppidan Larsen, J. T. Ravnkilde, Morten Ginnerup, Ole Hansen

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    In-situ fatigue test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel (nano-nickel). The devices feature in-plane approximately pure bending with fixed displacement of the test specimen of the dimensions: widths from 2μm to 3.7μm, a height of 7μm and an effective length from 4μm to 27μm. Maximum stresses of the test beam were calculated to be 500MPa to 2100MPa by use of FEM tools. The test results indicate very promising fatigue properties of nano-nickel, as none of the test devices have shown fatigue failure or even initiation of cracks after 108 cycles. The combination of high strength and toughness, which is known for nanocrystalline materials, together with very small test specimens and low surface roughness could be the explanation for the good fatigue properties.
    Original languageEnglish
    Title of host publicationThe Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002.
    Publication date2002
    ISBN (Print)0-7803-7185-2
    Publication statusPublished - 2002
    Event15th IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, United States
    Duration: 20 Jan 200224 Jan 2002
    Conference number: 15


    Conference15th IEEE International Conference on Micro Electro Mechanical Systems
    CountryUnited States
    CityLas Vegas, NV

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