Device including a contact detector

Dirch Hjorth Petersen (Inventor), Rong Lin (Inventor)

    Research output: Patent

    Abstract

    The present invention relates to a probe for determining an electrical property of an area of a surface of a test sample, the probe is intended to be in a specific orientation relative to the test sample. The probe may comprise a supporting body defining a first surface. A plurality of cantilever arms (12) may extend from the supporting body in co-planar relationship with the first surface. The plurality of cantilever arms (12) may extend substantially parallel to each other and each of the plurality of cantilever arms (12) may include an electrical conductive tip for contacting the area of the test sample by movement of the probe relative to the surface of the test sample into the specific orientation.; The probe may further comprise a contact detector (14) extending from the supporting body arranged so as to contact the surface of the test sample prior to any one of the plurality of cantilever arms (12) contacting the surface of the test sample when performing the movement.
    Original languageEnglish
    IPCG01R1/067
    Patent numberUS8058886
    Filing date15/11/2011
    CountryUnited States
    Priority date12/03/2008
    Priority numberWO2008DK00100
    Publication statusPublished - 2011

    Bibliographical note

    Also published as: US2010141291, EP1970714, KR20100015473, JP2010520998, EP2132578, EP2132578, WO2008110174, CN101657729, CN101657729, and AT498843.

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