Development of nanostructured protective "sight glasses" for IR gas sensors

René Bergmann; Zachary James Davis; Michael Stenbæk Schmidt; Sønnik Clausen; Anja Boisen; Jens Muller Jensen; Rainer Buchner; Thomine Stolberg-Rohr; Mogens Havsteen Jakobsen

doi:10.1117/12.883921

Development of nanostructured protective "sight glasses" for IR gas sensors

René Bergmann, Zachary James Davis, Michael Stenbæk Schmidt, Sønnik Clausen, Anja Boisen, Jens Muller Jensen, Rainer Buchner, Thomine Stolberg-Rohr, Mogens Havsteen Jakobsen

Danfoss AS

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.

Original language	English
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8016
Pages (from-to)	80160S
ISSN	0277-786X
DOIs	https://doi.org/10.1117/12.883921
Publication status	Published - 2011
Event	Window and Dome Technologies and Materials XII - Orlando World Center Marriott Resort & Convention, Orlando, United States Duration: 27 Apr 2011 → 28 Apr 2011

Conference

Conference	Window and Dome Technologies and Materials XII
Location	Orlando World Center Marriott Resort & Convention
Country/Territory	United States
City	Orlando
Period	27/04/2011 → 28/04/2011

Keywords

Protective window
Nanostructured surface
Infrared gas sensor
Combustion pollution control technologies
Superhydrophobic
Anti-reflective surface

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10.1117/12.883921

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title = "Development of nanostructured protective {"}sight glasses{"} for IR gas sensors",

abstract = "In this work protective {"}sight glasses{"} for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The {"}self-cleaning{"} surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective {"}moth-eye{"} effect in certain wavelength ranges owing to the nanostructures.",

keywords = "Protective window, Nanostructured surface, Infrared gas sensor, Combustion pollution control technologies, Superhydrophobic, Anti-reflective surface, Forbr{\ae}nding milj{\o}forbedrende teknologier",

author = "Ren{\'e} Bergmann and Davis, \{Zachary James\} and Schmidt, \{Michael Stenb{\ae}k\} and S{\o}nnik Clausen and Anja Boisen and Jensen, \{Jens Muller\} and Rainer Buchner and Thomine Stolberg-Rohr and Jakobsen, \{Mogens Havsteen\}",

year = "2011",

doi = "10.1117/12.883921",

language = "English",

volume = "8016",

pages = "80160S",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Development of nanostructured protective "sight glasses" for IR gas sensors

AU - Bergmann, René

AU - Davis, Zachary James

AU - Schmidt, Michael Stenbæk

AU - Clausen, Sønnik

AU - Boisen, Anja

AU - Jensen, Jens Muller

AU - Buchner, Rainer

AU - Stolberg-Rohr, Thomine

AU - Jakobsen, Mogens Havsteen

PY - 2011

Y1 - 2011

N2 - In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.

AB - In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.

KW - Protective window

KW - Nanostructured surface

KW - Infrared gas sensor

KW - Combustion pollution control technologies

KW - Superhydrophobic

KW - Anti-reflective surface

KW - Forbrænding miljøforbedrende teknologier

U2 - 10.1117/12.883921

DO - 10.1117/12.883921

M3 - Conference article

SN - 0277-786X

VL - 8016

SP - 80160S

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Window and Dome Technologies and Materials XII

Y2 - 27 April 2011 through 28 April 2011

ER -

Development of nanostructured protective "sight glasses" for IR gas sensors

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Keywords

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