Abstract
In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.
Original language | English |
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Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 8016 |
Pages (from-to) | 80160S |
ISSN | 0277-786X |
DOIs | |
Publication status | Published - 2011 |
Event | Window and Dome Technologies and Materials XII - Orlando World Center Marriott Resort & Convention, Orlando, United States Duration: 27 Apr 2011 → 28 Apr 2011 |
Conference
Conference | Window and Dome Technologies and Materials XII |
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Location | Orlando World Center Marriott Resort & Convention |
Country/Territory | United States |
City | Orlando |
Period | 27/04/2011 → 28/04/2011 |
Keywords
- Protective window
- Nanostructured surface
- Infrared gas sensor
- Combustion pollution control technologies
- Superhydrophobic
- Anti-reflective surface