Development of nanostructured protective "sight glasses" for IR gas sensors

René Bergmann, Zachary James Davis, Michael Stenbæk Schmidt, Sønnik Clausen, Anja Boisen, Jens Muller Jensen, Rainer Buchner, Thomine Stolberg-Rohr, Mogens Havsteen Jakobsen

    Research output: Contribution to journalConference articleResearchpeer-review


    In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.
    Original languageEnglish
    JournalProceedings of the SPIE - The International Society for Optical Engineering
    Pages (from-to)80160S
    Publication statusPublished - 2011
    EventWindow and Dome Technologies and Materials XII - Orlando World Center Marriott Resort & Convention, Orlando, United States
    Duration: 27 Apr 201128 Apr 2011


    ConferenceWindow and Dome Technologies and Materials XII
    LocationOrlando World Center Marriott Resort & Convention
    Country/TerritoryUnited States


    • Protective window
    • Nanostructured surface
    • Infrared gas sensor
    • Combustion pollution control technologies
    • Superhydrophobic
    • Anti-reflective surface


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