Development of highly electronegative plasma sources for negative ion etching, Plasma Etch and Strip in Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Keywords

@inbook{d62af1ee17e94933b8b78191c2f7939d,

title = "Development of highly electronegative plasma sources for negative ion etching, Plasma Etch and Strip in Microelectronics",

keywords = "Plasma processing, Fusion energy, Fusionsenergi, Plasmaprocessering",

author = "Mihai Draghici and Eugen Stamate",

year = "2009",

language = "English",

booktitle = "Proceedings",

}