Development of Focused Ion Beam technique for high speed steel 3D-SEM artefact fabrication

Lorenzo Carli (Invited author), A. Nicole MacDonald (Invited author), Leonardo De Chiffre (Invited author), F. Marinello (Invited author), S. Carmignato (Invited author), Andy Horsewell (Invited author)

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

The work describes preliminary manufacture by grinding, followed by machining on a Focused Ion Beam (FIB), of a high speed steel step artefact for 3D-SEM calibration. The FIB is coupled with a SEM in the so called dual beam instrument. The milling capabilities of FIB were checked from a qualitative point of view, using the dual beam SEM imaging, and quantitatively using a reference stylus instrument, to establish traceability. A triangular section having a depth of about 10 μm was machined, where the 50 μm curvature radius due to grinding was reduced to about 2 μm by FIB milling as it was estimated using the dual beam SEM.
Original languageEnglish
Title of host publicationProceedings of the euspen International Conference
Publication date2009
Publication statusPublished - 2009
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology - San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009
Conference number: 9

Conference

Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology
Number9
CountrySpain
CitySan Sebastian
Period02/06/200905/06/2009

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