Development and production of a multilayer-coated X-ray reecting stack for the Athena mission

Sonny Massahi, Desiree Della Monica Ferreira, Finn Erland Christensen, B. Shortt, D.A. Girou, M. Collon, B. Landgraf, N. Barriere, M. Krumrey, L. Cibik, S. Schreiber

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray
    EditorsJan-Willem A. den Herder, Tadayuki Takahashi, Marshall Bautz
    Number of pages10
    Volume9905
    PublisherSPIE - International Society for Optical Engineering
    Publication date2016
    Article number99055P
    DOIs
    Publication statusPublished - 2016
    EventSpace Telescopes and Instrumentation 2016 - Edinburgh, United Kingdom
    Duration: 26 Jun 20161 Jul 2016

    Conference

    ConferenceSpace Telescopes and Instrumentation 2016
    Country/TerritoryUnited Kingdom
    CityEdinburgh
    Period26/06/201601/07/2016

    Keywords

    • Athena
    • Silicon pore optics (SPO)
    • AFM
    • Surface Roughness
    • Photolithography Process
    • Plasma Cleaning
    • Multilayer Deposition
    • DC Magnetron Sputtering
    • Lift-off Process
    • Stacking
    • XRR
    • X-ray Optics

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