Development and production of a multilayer-coated X-ray reecting stack for the Athena mission

Sonny Massahi, Desiree Della Monica Ferreira, Finn Erland Christensen, B. Shortt, D.A. Girou, M. Collon, B. Landgraf, N. Barriere, M. Krumrey, L. Cibik, S. Schreiber

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray
EditorsJan-Willem A. den Herder, Tadayuki Takahashi, Marshall Bautz
Number of pages10
PublisherSPIE - International Society for Optical Engineering
Publication date2016
Article number99055P
Publication statusPublished - 2016
EventSpace Telescopes and Instrumentation 2016 - Edinburgh, United Kingdom
Duration: 26 Jun 20161 Jul 2016


ConferenceSpace Telescopes and Instrumentation 2016
CountryUnited Kingdom


  • Athena
  • Silicon pore optics (SPO)
  • AFM
  • Surface Roughness
  • Photolithography Process
  • Plasma Cleaning
  • Multilayer Deposition
  • DC Magnetron Sputtering
  • Lift-off Process
  • Stacking
  • XRR
  • X-ray Optics

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