@inproceedings{efb28b78333b449b9593233109df9d9e,
title = "Development and production of a multilayer-coated X-ray reecting stack for the Athena mission",
keywords = "Athena, Silicon pore optics (SPO), AFM, Surface Roughness, Photolithography Process, Plasma Cleaning, Multilayer Deposition, DC Magnetron Sputtering, Lift-off Process, Stacking, XRR, X-ray Optics",
author = "Sonny Massahi and {Della Monica Ferreira}, Desiree and Christensen, {Finn Erland} and B. Shortt and D.A. Girou and M. Collon and B. Landgraf and N. Barriere and M. Krumrey and L. Cibik and S. Schreiber",
year = "2016",
doi = "10.1117/12.2233519",
language = "English",
volume = "9905",
editor = "{den Herder}, {Jan-Willem A. } and Takahashi, {Tadayuki } and Bautz, {Marshall }",
booktitle = "Proceedings of Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray",
publisher = "SPIE - International Society for Optical Engineering",
note = "Space Telescopes and Instrumentation 2016 ; Conference date: 26-06-2016 Through 01-07-2016",
}