Development and manufacturing of SPO X-ray mirrors

Boris Landgraf*, Maximilien J. Collon, Giuseppe Vacanti, Nicolas M. Barriére, Ramses Günther, Mark Vervest, Luc Voruz, Sjoerd Verhoeckx, Ljubisa Babic, Laurens Keek, David Girou, Ben Okma, Marco W. Beijersbergen, Marcos Bavdaz, Eric Wille, Sebastiaan Fransen, Brian Shortt, Ivo Ferreira, Jeroen Haneveld, Arenda KoelewijnRonald Start, Maurice Wijnperlé, Jan-Joost Lankwarden, Coen van Baren, Paul Hieltjes, Jan Willem den Herder, Vadim Burwitz, Giovanni Pareschi, Sonny Massahi, Desiree Della Monica Ferreira, Finn Erland Christensen, Giuseppe Valsecchi, Paul Oliver, Ian Chequer, Kevin Ball

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics enabling future X-ray observatories such as ATHENA. SPO is being developed at cosine together with the European Space Agency (ESA) and academic as well as industrial partners. The SPO modules are lightweight, yet stiff, high-resolution X-ray optics, allowing missions to reach a large effective area of several square meters. These properties of the optics are mainly linked to the mirror plates consisting of mono-crystalline silicon. Silicon is rigid, has a relatively low density, a very good thermal conductivity and excellent surface finish, both in terms of figure and surface roughness. For Athena, a large number of mirror plates is required, around 100,000 for the nominal configuration. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular shapes SPO mirror plates in high quality, large quantity and at low cost. Within the last years, several aspects of the SPO mirror plate have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. In view of flight model production, a second source of mirror plates has been added in addition to the first plate supplier. The paper will provide an overview of most recent plate design, metrology and production developments.
Original languageEnglish
Title of host publicationOptics for EUV, X-Ray, and Gamma-Ray Astronomy IX
EditorsStephen L. O'Dell , Giovanni Pareschi
Number of pages9
PublisherSPIE - International Society for Optical Engineering
Publication date2019
Article number111190E
Publication statusPublished - 2019
Event2019 SPIE Optical Engineering + Applications - San Diego, United States
Duration: 11 Aug 201915 Aug 2019


Conference2019 SPIE Optical Engineering + Applications
CountryUnited States
CitySan Diego
SeriesProceedings of S P I E - International Society for Optical Engineering


  • X-ray optics
  • X-ray astronomy
  • Silicon
  • Wafer
  • Stack
  • Pore optics
  • X-ray telescopes
  • SPO


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