Development and Characterisation of KOH Resistant PECVD Silicon Nitride for Microsystems Applications

Frank Engel Rasmussen, Berit Geilman, M. Heschel, Ole Hansen, Anders Michael Jørgensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the International Symposium on Dielectrics in Emerging Technologies
    Publication date2003
    Publication statusPublished - 2003

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