Determination of stress build-up during NIL process in triangular polymer structures

Irene Fernández-Cuesta; X. Borrisé; A. Retolaza; S. Merino; D. A. Mendels; Ole Hansen; Anders Kristensen; F. Pére

Determination of stress build-up during NIL process in triangular polymer structures

Irene Fernández-Cuesta, X. Borrisé, A. Retolaza, S. Merino, D. A. Mendels, Ole Hansen, Anders Kristensen, F. Pére

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Original language	English
Title of host publication	MNE 33rd International Conference on Micro- and Nano-Engineering
Publication date	2007
Pages	177-178
Publication status	Published - 2007
Event	33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark Duration: 23 Sept 2007 → 26 Sept 2007 Conference number: 33 http://www.mne07.org/

Conference

Conference	33rd International Conference on Micro- and Nano-Engineering
Number	33
Country/Territory	Denmark
City	Copenhagen
Period	23/09/2007 → 26/09/2007
Internet address	http://www.mne07.org/

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title = "Determination of stress build-up during NIL process in triangular polymer structures",

author = "Irene Fern{\'a}ndez-Cuesta and X. Borris{\'e} and A. Retolaza and S. Merino and Mendels, {D. A.} and Ole Hansen and Anders Kristensen and F. P{\'e}re",

year = "2007",

language = "English",

pages = "177--178",

booktitle = "MNE 33rd International Conference on Micro- and Nano-Engineering",

note = "33rd International Conference on Micro- and Nano-Engineering, MNE07 ; Conference date: 23-09-2007 Through 26-09-2007",

url = "http://www.mne07.org/",

}

Fernández-Cuesta, I, Borrisé, X, Retolaza, A, Merino, S, Mendels, DA, Hansen, O , Kristensen, A & Pére, F 2007, Determination of stress build-up during NIL process in triangular polymer structures. in MNE 33rd International Conference on Micro- and Nano-Engineering. pp. 177-178, 33rd International Conference on Micro- and Nano-Engineering, Copenhagen, Denmark, 23/09/2007.

TY - ABST

T1 - Determination of stress build-up during NIL process in triangular polymer structures

AU - Fernández-Cuesta, Irene

AU - Borrisé, X.

AU - Retolaza, A.

AU - Merino, S.

AU - Mendels, D. A.

AU - Hansen, Ole

AU - Kristensen, Anders

AU - Pére, F.

N1 - Conference code: 33

PY - 2007

Y1 - 2007

M3 - Conference abstract in proceedings

SP - 177

EP - 178

BT - MNE 33rd International Conference on Micro- and Nano-Engineering

T2 - 33rd International Conference on Micro- and Nano-Engineering

Y2 - 23 September 2007 through 26 September 2007

ER -