Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures

I. Fernandez-Cuesta; X. Borrise; A. Retolaza; S. Merino; D.A. Mendels; Ole Hansen; Anders Kristensen; F. Perez-Murano

doi:10.1016/j.mee.2007.11.012

Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures

I. Fernandez-Cuesta, X. Borrise, A. Retolaza, S. Merino, D.A. Mendels, Ole Hansen, Anders Kristensen, F. Perez-Murano

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
Pages (from-to)	838-841
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2007.11.012
Publication status	Published - 2008

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@article{48d478f9287a491e9e27da9fbf69097f,

title = "Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures",

author = "I. Fernandez-Cuesta and X. Borrise and A. Retolaza and S. Merino and D.A. Mendels and Ole Hansen and Anders Kristensen and F. Perez-Murano",

year = "2008",

doi = "10.1016/j.mee.2007.11.012",

language = "English",

volume = "85",

pages = "838--841",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-6",

}

TY - JOUR

T1 - Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures

AU - Fernandez-Cuesta, I.

AU - Borrise, X.

AU - Retolaza, A.

AU - Merino, S.

AU - Mendels, D.A.

AU - Hansen, Ole

AU - Kristensen, Anders

AU - Perez-Murano, F.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.mee.2007.11.012

DO - 10.1016/j.mee.2007.11.012

M3 - Journal article

SN - 0167-9317

VL - 85

SP - 838

EP - 841

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

ER -