Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures

I. Fernandez-Cuesta, X. Borrise, A. Retolaza, S. Merino, D.A. Mendels, Ole Hansen, Anders Kristensen, F. Perez-Murano

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Pages (from-to)838-841
ISSN0167-9317
DOIs
Publication statusPublished - 2008

Cite this

Fernandez-Cuesta, I., Borrise, X., Retolaza, A., Merino, S., Mendels, D. A., Hansen, O., ... Perez-Murano, F. (2008). Determination of Stress Build-up during Nanoimprint process in Triangular Polymer Structures. Microelectronic Engineering, 85(5-6), 838-841. https://doi.org/10.1016/j.mee.2007.11.012