Determination of piezoresistive properties of silicon and strained silicon germanium

Morten Berg Arnoldus, T. Hedegaard, M. Olesen, Jacob Richter, Erik Vilain Thomsen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Eurosensors XX
    Place of PublicationGöteborg, Sweden
    Publication date2006
    Pages378-379
    ISBN (Print)91-631-9280-2
    Publication statusPublished - 2006
    Event20th European Conference on Solid-State Transducers - Göteborg, Sweden
    Duration: 17 Sep 200620 Sep 2006
    Conference number: 20
    http://www.mc2.chalmers.se/conferences/EUROSENSORS2006/

    Conference

    Conference20th European Conference on Solid-State Transducers
    Number20
    CountrySweden
    CityGöteborg
    Period17/09/200620/09/2006
    Internet address

    Cite this

    Arnoldus, M. B., Hedegaard, T., Olesen, M., Richter, J., & Thomsen, E. V. (2006). Determination of piezoresistive properties of silicon and strained silicon germanium. In Proceedings of Eurosensors XX (pp. 378-379).