Determination of negative-ion and electron parameters in an Ar/SF6 plasma

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Abstract

A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron. © 1998 American Institute of Physics
Original languageEnglish
JournalJournal of Applied Physics
Volume84
Issue number5
Pages (from-to)2450-2458
ISSN0021-8979
DOIs
Publication statusPublished - 1998
Externally publishedYes

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