Determination of negative-ion and electron parameters in an Ar/SF6 plasma

Eugen Stamate; K. Ohe

doi:10.1063/1.368406

Determination of negative-ion and electron parameters in an Ar/SF₆ plasma

Eugen Stamate, K. Ohe

Nagoya Institute of Technology

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron. © 1998 American Institute of Physics

Original language	English
Journal	Journal of Applied Physics
Volume	84
Issue number	5
Pages (from-to)	2450-2458
ISSN	0021-8979
DOIs	https://doi.org/10.1063/1.368406
Publication status	Published - 1998
Externally published	Yes

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title = "Determination of negative-ion and electron parameters in an Ar/SF6 plasma",

abstract = "A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron. {\textcopyright} 1998 American Institute of Physics",

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T1 - Determination of negative-ion and electron parameters in an Ar/SF6 plasma

AU - Stamate, Eugen

AU - Ohe, K.

PY - 1998

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N2 - A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron. © 1998 American Institute of Physics

AB - A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron. © 1998 American Institute of Physics

U2 - 10.1063/1.368406

DO - 10.1063/1.368406

M3 - Journal article

SN - 0021-8979

VL - 84

SP - 2450

EP - 2458

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 5