Abstract
The present invention relates to a system for detecting terahertz radiation, a camera device, and a method for detecting terahertz radiation.
Original language | English |
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IPC | G01J5/08, G01N21/35, H01L31/0232 |
Patent number | WO2015028029 |
Filing date | 05/03/2015 |
Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
Priority date | 29/08/2013 |
Priority number | EP20130182239 |
Publication status | Published - 5 Mar 2015 |