Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

Jesper Bay, Ole Hansen, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume53
    Pages (from-to)232-236
    ISSN0924-4247
    Publication statusPublished - 1996

    Cite this

    @article{46d0df6bad7c4d55a75a1d910dd3b382,
    title = "Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor",
    author = "Jesper Bay and Ole Hansen and Siebe Bouwstra",
    year = "1996",
    language = "English",
    volume = "53",
    pages = "232--236",
    journal = "Sensors and Actuators A: Physical",
    issn = "0924-4247",
    publisher = "Elsevier",

    }

    Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor. / Bay, Jesper; Hansen, Ole; Bouwstra, Siebe.

    In: Sensors and Actuators A: Physical, Vol. 53, 1996, p. 232-236.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor

    AU - Bay, Jesper

    AU - Hansen, Ole

    AU - Bouwstra, Siebe

    PY - 1996

    Y1 - 1996

    M3 - Journal article

    VL - 53

    SP - 232

    EP - 236

    JO - Sensors and Actuators A: Physical

    JF - Sensors and Actuators A: Physical

    SN - 0924-4247

    ER -