Design of a silicon microphone with differential read-out of a
                sealed double parallel-plate capacitor

Jesper Bay, Ole Hansen, Siebe Bouwstra

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Sensors and Actuators A: Physical
Volume	53
Pages (from-to)	232-236
ISSN	0924-4247
Publication status	Published - 1996

OpenUrl availability

@article{46d0df6bad7c4d55a75a1d910dd3b382,

title = "Design of a silicon microphone with differential read-out of a sealed double parallel-plate capacitor",

author = "Jesper Bay and Ole Hansen and Siebe Bouwstra",

year = "1996",

language = "English",

volume = "53",

pages = "232--236",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

}