Design of a robust photonic crystal mirror for MEMS VCSELs

Arnhold Simonsen*, Gyeong Cheol Park, Thor Ersted Ansbæk, Ole Hansen, Kresten Yvind

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

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Wavelength tunable lasers with narrow dynamic linewidths are essential in many applications, such as optical coherence tomography and LiDAR. In this letter, we present a 2D mirror design that provides large optical bandwidth and high reflection while being stiffer than 1D mirrors. Specifically, we investigate the effect of rounded corners of rectangles as they are transferred from the CAD to the wafer by lithography and etching.

Original languageEnglish
JournalOptics Express
Issue number11
Pages (from-to)18240-18249
Publication statusPublished - 22 May 2023

Bibliographical note

Funding Information:
H2020 Excellent Science (H2020-EU.1.3.1, ITN network, Marie Skłodowska-Curie Actions, NETLAS 860807); Danmarks Frie Forskningsfond (8022-00110A, STEPS).

Publisher Copyright:
© 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.


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