Design of a robust photonic crystal mirror for MEMS VCSELs

Arnhold Simonsen; Gyeong Cheol Park; Thor Ersted Ansbæk; Ole Hansen; Kresten Yvind

doi:10.1364/OE.491411

Design of a robust photonic crystal mirror for MEMS VCSELs

Arnhold Simonsen^*, Gyeong Cheol Park, Thor Ersted Ansbæk, Ole Hansen, Kresten Yvind

^*Corresponding author for this work

Research output: Contribution to journal › Journal article › Research › peer-review

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Abstract

Wavelength tunable lasers with narrow dynamic linewidths are essential in many applications, such as optical coherence tomography and LiDAR. In this letter, we present a 2D mirror design that provides large optical bandwidth and high reflection while being stiffer than 1D mirrors. Specifically, we investigate the effect of rounded corners of rectangles as they are transferred from the CAD to the wafer by lithography and etching.

Original language	English
Journal	Optics Express
Volume	31
Issue number	11
Pages (from-to)	18240-18249
ISSN	1094-4087
DOIs	https://doi.org/10.1364/OE.491411
Publication status	Published - 22 May 2023

Bibliographical note

Funding Information:
H2020 Excellent Science (H2020-EU.1.3.1, ITN network, Marie Skłodowska-Curie Actions, NETLAS 860807); Danmarks Frie Forskningsfond (8022-00110A, STEPS).

Publisher Copyright:
© 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.

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title = "Design of a robust photonic crystal mirror for MEMS VCSELs",

abstract = "Wavelength tunable lasers with narrow dynamic linewidths are essential in many applications, such as optical coherence tomography and LiDAR. In this letter, we present a 2D mirror design that provides large optical bandwidth and high reflection while being stiffer than 1D mirrors. Specifically, we investigate the effect of rounded corners of rectangles as they are transferred from the CAD to the wafer by lithography and etching.",

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AU - Simonsen, Arnhold

AU - Park, Gyeong Cheol

AU - Ansbæk, Thor Ersted

AU - Hansen, Ole

AU - Yvind, Kresten

N1 - Funding Information: H2020 Excellent Science (H2020-EU.1.3.1, ITN network, Marie Skłodowska-Curie Actions, NETLAS 860807); Danmarks Frie Forskningsfond (8022-00110A, STEPS). Publisher Copyright: © 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.

PY - 2023/5/22

Y1 - 2023/5/22

N2 - Wavelength tunable lasers with narrow dynamic linewidths are essential in many applications, such as optical coherence tomography and LiDAR. In this letter, we present a 2D mirror design that provides large optical bandwidth and high reflection while being stiffer than 1D mirrors. Specifically, we investigate the effect of rounded corners of rectangles as they are transferred from the CAD to the wafer by lithography and etching.

AB - Wavelength tunable lasers with narrow dynamic linewidths are essential in many applications, such as optical coherence tomography and LiDAR. In this letter, we present a 2D mirror design that provides large optical bandwidth and high reflection while being stiffer than 1D mirrors. Specifically, we investigate the effect of rounded corners of rectangles as they are transferred from the CAD to the wafer by lithography and etching.

U2 - 10.1364/OE.491411

DO - 10.1364/OE.491411

M3 - Journal article

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AN - SCOPUS:85163158772

SN - 1094-4087

VL - 31

SP - 18240

EP - 18249

JO - Optics Express

JF - Optics Express

IS - 11

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Design of a robust photonic crystal mirror for MEMS VCSELs

Abstract

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